The source is this paywalled report, the headline of which notably doesn’t go as far as the techpowerup one, though that might just be to bait people into buying access to the full report.

I know very little about fabrication itself, but it seems like the gist is it’s impressive, but pretty expensive and pushing the limits of what’s realistic with DUV. I wonder what the plan is if China still can’t source (or develop) EUV tech soon?